![]() |
Volumn 149, Issue 7, 2002, Pages
|
Poly-Si thin-film transistors crystallized by electron-beam annealing
a
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ANNEALING;
CARRIER MOBILITY;
CRYSTALLIZATION;
ELECTRON BEAMS;
EXCIMER LASERS;
POLYSILICON;
SUBSTRATES;
THRESHOLD VOLTAGE;
ELECTRON-BEAM ANNEALING;
THIN FILM TRANSISTORS;
|
EID: 0036641885
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1481529 Document Type: Article |
Times cited : (6)
|
References (13)
|