Influence of thermal properties of polymers on nanoimprint lithography performance

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 6 B, 2002, Pages 4203-4207

  Perret, Corinne ^a,b   Gourgon, Cécile ^a   Micouin, Guillaume ^a   Grolier, Jean Pierre ^a  

^a CEA LETI   (France)

^b UNIVERSITÉ CLERMONT AUVERGNE   (France)

Author keywords

CD control; Glass transition temperature; Nanoimprint lithography; Printing uniformity

Indexed keywords

CHEMICAL RESISTANCE; ETCHING; NANOSTRUCTURED MATERIALS; PHOTORESISTS; POLYMERS; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS; THERMODYNAMIC PROPERTIES;

NANO IMPRINT LITHOGRAPHY (NIL);

NANOTECHNOLOGY;

EID: 0036614417     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4203     Document Type: Article

References (9)