Effect of annealing on fatigue properties of Sb-doped lead zirconate titanate thin films deposited by DC reactive sputtering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 1, 1999, Pages 122-126

  Choi, Won Youl ^a   Kim, Ho Gi ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Annealing; Fatigue; Grain size; Lead zirconate titanate; PZT; Sb doped

Indexed keywords

ANNEALING; FATIGUE OF MATERIALS; FERROELECTRIC MATERIALS; GRAIN SIZE AND SHAPE; LEAD COMPOUNDS; SPUTTERING; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

LEAD ZIRCONATE TITANATE; THIN FILM CAPACITOR;

DIELECTRIC FILMS;

EID: 0032629135     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.38.122     Document Type: Article

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