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Volumn 95, Issue 1-3, 1999, Pages 128-132
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Effect of annealing on improving the quality of lead zirconate titanate thin films on Pt/SiO2/Si substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
ANNEALING;
CRYSTAL ORIENTATION;
LEAD COMPOUNDS;
MAGNETRON SPUTTERING;
PEROVSKITE;
PHASE TRANSITIONS;
PIEZOELECTRIC MATERIALS;
PLATINUM;
SILICA;
SILICON;
THERMAL EFFECTS;
LEAD ZIRCONATE TITANATE;
PEROVSKITE PHASE;
PYROCHLORE PHASE;
THIN FILMS;
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EID: 0343603636
PISSN: 09240136
EISSN: None
Source Type: Journal
DOI: 10.1016/S0924-0136(99)00283-6 Document Type: Article |
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Times cited : (11)
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References (15)
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