High density electrical feedthrough fabricated by deep reactive ion etching of Pyrex glass

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 98-101

  Li, X ^a   Abe, T ^a   Liu, Y ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (SPECIFIC GRAVITY); ELECTROPLATED PRODUCTS; FABRICATION; INDUCTIVELY COUPLED PLASMA; REACTIVE ION ETCHING; SPUTTERING; SULFUR COMPOUNDS;

PYREX GLASS PLATES;

GLASS CERAMICS;

EID: 0035016478     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)