Shallow p-n junctions formed in silicon using pulsed photon annealing

Semiconductors

Volumn 36, Issue 5, 2002, Pages 581-587

  Sisianu S T ^a   Sisianu T S ^a   Railean, S K ^a  

^a TECHNICAL UNIVERSITY OF MOLDOVA   (Moldova)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036588550     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1478552     Document Type: Article

References (26)

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