Enhanced diffusion of platinum in electron-irradiated silicon

Materials Science and Engineering B

Volumn 57, Issue 2, 1999, Pages 161-164

  Schmidt, D C ^a,b   Svensson, B G ^a   Lindstrom J L ^c   Godey, S ^d   Ntsoenzok, E ^d   Barbot, J F ^b   Blanchard, C ^b  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b UNIVERSITÉ DE POITIERS   (France)

^c SWEDISH DEFENCE RESEARCH AGENCY   (Sweden)

^d Centre National de la Recherche Scientifique   (France)

Author keywords

DLTS; Electron irradiation; Enhanced diffusion; Platinum; Vacancy

Indexed keywords

BAND STRUCTURE; DEEP LEVEL TRANSIENT SPECTROSCOPY; ELECTRON IRRADIATION; INTERDIFFUSION (SOLIDS); PLATINUM;

DEPTH PROFILING;

SEMICONDUCTING SILICON;

EID: 0011142033     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00315-8     Document Type: Article

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