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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 5 A, 2002, Pages 2954-2957

Characterization of the refractive index of lateral-oxidation-formed AlxOy by spectroscopic ellipsometry

(2) Kitatani, Takeshi a Kondow, Masahiko a

a HITACHI LTD (Japan)

Author keywords

AlxOy; Lateral oxidation; Refractive index; Spectroscopic ellipsometry; Vertical cavity surface emitting laser

Indexed keywords

ELLIPSOMETRY; LASER THEORY; MIRRORS; OXIDATION; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS;

SPECTROSCOPIC ELLIPSOMETRY (SE); VERTICAL-CAVITY SURFACE-EMITTING LASERS (VCSEL);

ALUMINUM COMPOUNDS;

EID: 0036578237 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.41.2954 Document Type: Article

Times cited : (15)

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