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Volumn 299-302, Issue , 2002, Pages 411-415
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Investigations of the electron transport behavior in microcrystalline Si films
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
CHARGE CARRIERS;
ELECTRIC CONDUCTIVITY;
ELECTRON TRANSPORT PROPERTIES;
ELECTRON TUNNELING;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SEMICONDUCTING SILICON;
SUBSTRATES;
THERMAL EFFECTS;
THERMALLY ACTIVATED CARRIER TRANSPORT;
THIN FILMS;
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EID: 0036539107
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(01)00955-3 Document Type: Article |
Times cited : (19)
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References (14)
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