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Volumn 299-302, Issue , 2002, Pages 411-415

Investigations of the electron transport behavior in microcrystalline Si films

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CHARGE CARRIERS; ELECTRIC CONDUCTIVITY; ELECTRON TRANSPORT PROPERTIES; ELECTRON TUNNELING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON; SUBSTRATES; THERMAL EFFECTS;

EID: 0036539107     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)00955-3     Document Type: Article
Times cited : (19)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.