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Volumn 237-239, Issue 1-4, 2002, Pages 936-941

Quantum chemical study of gas-phase reactions of trimethylaluminium and triethylaluminium with ammonia in III-V nitride semiconductor crystal growth

(4) Ikenaga, Masahito a Nakamura, Koichi a Tachibana, Akitomo a Matsumoto, Koh b

a KYOTO UNIVERSITY (Japan)

b TAIYO NIPPON SANSO CORPORATION (Japan)

Author keywords

A1. Computer simulation; A1. Regional density functional theory; A3. Parasitic reactions; B1. Gallium compounds; B1. Nitrides; B2. Semiconducting III V materials

Indexed keywords

AMMONIA; ETHANE; GALLIUM NITRIDE; METHANE; PROBABILITY DENSITY FUNCTION; REACTION KINETICS; SEMICONDUCTING GALLIUM COMPOUNDS;

PARASITIC REACTIONS;

CRYSTAL GROWTH;

EID: 0036530598 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(01)02002-4 Document Type: Article

Times cited : (26)

References (28)

1
- 0342830447
- and references therein
- (1999) Acta Phys. Pol. Sect. A , vol.95 , pp. 153
- Nakamura, S.¹

2
- 0031223973
- and references therein
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 5393
- Akasaki, I.¹ Amano, H.²

3
- 0030651745
- (1997) Mater. Res. Soc. Symp. Proc. , vol.449 , pp. 129
- Uchida, K.¹ Tokunaga, H.² Inashi, Y.³ Akutsu, N.⁴ Matsumoto, K.⁵

4
- 0001913683
- (1996) Appl. Phys. Lett. , vol.69 , pp. 55
- Thon, A.¹ Kuech, T.F.²

5
- 0030156733
- (1996) J. Electron Mater. , vol.25 , pp. 1004
- Chen, C.H.¹ Liu, H.² Steigerwald, D.³ Imler, W.⁴ Kuo, C.P.⁵ Ludowise, M.⁶ Lester, S.⁷ Amano, J.⁸

6
- 0019021071
- (1980) J. Electron Mater. , vol.9 , pp. 601
- Noad, J.P.¹ SpringThorpe, A.J.²

7
- 0003049381
- (1983) J. Crystallogr. Growth , vol.64 , pp. 68
- Bass, S.J.¹ Pickering, C.² Young, M.L.³

8
- 0021386481
- (1984) Appl. Phys. Lett. , vol.44 , pp. 550
- Kuo, C.P.¹ Yuan, J.S.² Cohen, R.M.³ Dunn, J.⁴ Stringfellow, G.B.⁵

9
- 0006244383
- Blue laser, light emitting diodes
- Ohmsha, Tokyo
- (1998) Proceedings of the International Symposium , pp. 308
- Tachibana, A.¹ Nakamura, K.² Makino, O.³ Tokunaga, H.⁴ Akutsu, N.⁵ Matsumoto, K.⁶

10
- 0006255552
- Nitride semiconductors
- Montpellier
- (1999) Proceedings of the 3rd International Conference
- Tachibana, A.¹ Makino, O.² Tanimura, S.³ Tokunaga, H.⁴ Akutsu, N.⁵ Matsumoto, K.⁶

11
- 0033221649
- (1999) Phys. Status Solidi A , vol.176 , pp. 699
- Tachibana, A.¹ Makino, O.² Tanimura, S.³ Tokunaga, H.⁴ Akutsu, N.⁵ Matsumoto, K.⁶

12
- 0034206914
- (2000) Appl. Surf. Sci. , vol.159 , Issue.160 , pp. 374
- Makino, O.¹ Nakamura, K.² Tachibana, A.³ Tokunaga, H.⁴ Akutsu, N.⁵ Matsumoto, K.⁶

13
- 0000167446
- (2000) J. Organomet. Chem. , vol.611 , pp. 514
- Nakamura, K.¹ Makino, O.² Tachibana, A.³ Matsumoto, K.⁴

14
- 84992247761
- Proceedings of the International Workshop on Nitride Semiconductors, The Institute of Pure and Applied Physics
- (2000) IPAP Conference Series , vol.1 , pp. 97
- Nakamura, K.¹ Makino, O.² Tachibana, A.³ Matsumoto, K.⁴

15
- 0034497248
- (2000) J. Crystal Growth , vol.221 , pp. 765
- Nakamura, K.¹ Hayashi, T.² Tachibana, A.³ Matsumoto, K.⁴

16
- 0006206412
- Tachibana Lab., Kyoto Univ., Kyoto
- (2001) Molecular Regional DFT Program Package

17
- 0345491105
- (1988) Phys. Rev. B , vol.37 , pp. 785
- Lee, C.¹ Yang, W.² Parr, R.G.³

18
- 0000189651
- (1993) J. Chem. Phys. , vol.98 , pp. 5648
- Becke, A.D.¹

19
- 33745770836
- (1985) J. Chem. Phys. , vol.82 , pp. 270
- Hay, P.J.¹ Wadt, W.R.²

20
- 27344448074
- (1985) J. Chem. Phys. , vol.82 , pp. 299
- Hay, P.J.¹ Wadt, W.R.²

21
- 0003568278
- H.F. Schaefer III (Ed.), Plenum, New York
- (1976) Modern Theoretical Chemistry
- Dunning, T.H.¹ Hay, P.J.²

22
- 0003718311
- Elsevier, New York
- (1984) Gaussian basis sets for molecular calculations , pp. 23
- Huzinaga, S.¹

23
- 84987057066
- (1986) Int. J. Quantum Chem. , vol.29 , pp. 73
- Mayer, I.¹

24
- 84987067780
- (1987) Int. J. Quantum Chem. Symp. , vol.21 , pp. 181
- Tachibana, A.¹

25
- 84987070969
- (1992) Int. J. Quantum Chem. , vol.41 , pp. 527
- Tachibana, A.¹ Parr, R.G.²

26
- 0000935212
- (1996) Int. J. Quantum Chem. , vol.57 , pp. 423
- Tachibana, A.¹

27
- 0033455254
- (1999) Theor. Chem. Acc. , vol.102 , pp. 188
- Tachibana, A.¹

28
- 0035934134
- (2001) J. Chem. Phys. , vol.115 , pp. 3497
- Tachibana, A.¹

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