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Physica Status Solidi (A) Applied Research

Volumn 176, Issue 1, 1999, Pages 699-703

Quantum chemical studies of gas phase reactions between TMA, TMG, TMI and NH3

(6) Tachibana, A a Makino, O a Tanimura, S a Tokunaga, H b Akutsu, N b Matsumoto, K b

a KYOTO UNIVERSITY (Japan)

b TAIYO NIPPON SANSO CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; COMPUTATIONAL METHODS; METALLORGANIC VAPOR PHASE EPITAXY; PHASE TRANSITIONS; QUANTUM THEORY; SEMICONDUCTOR GROWTH;

TRIMETHYLALUMINUM; TRIMETHYLGALLIUM;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0033221649 PISSN: 00318965 EISSN: None Source Type: Journal
DOI: 10.1002/(SICI)1521-396X(199911)176:1<699::AID-PSSA699>3.0.CO;2-B Document Type: Article

Times cited : (24)

References (8)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.