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Volumn 6, Issue 5-7, 1997, Pages 604-607
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Cubic boron nitride thin films by tuned r.f. magnetron sputtering
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0000047272
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/s0925-9635(96)00617-6 Document Type: Article |
Times cited : (20)
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References (13)
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