Influence of Al(Er) interlayer on the mechanical properties of AlN(Er) coatings

Surface and Coatings Technology

Volumn 151-152, Issue , 2002, Pages 466-470

  Oliveira, J C ^a   Cavaleiro, A ^a   Vieira, M T ^a  

^a UNIVERSITY OF COIMBRA   (Portugal)

Author keywords

Adhesion; Aluminium nitride; Erbium; Interlayer; Sputtering

Indexed keywords

ARTIFICIAL INTELLIGENCE; COATING TECHNIQUES; COMPOSITION; MECHANICAL PROPERTIES; SPUTTER DEPOSITION; STOICHIOMETRY; SUBSTRATES;

CRITICAL LOAD VALUES;

THIN FILMS;

ADHESION; ALUMINUM; ALUMINUM NITRIDE; ERBIUM; MECHANICAL PROPERTY; SPUTTERING;

EID: 0036497159     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01631-0     Document Type: Article

References (14)