The effects of TiAl interlayer on PVD TiAlN films

Surface and Coatings Technology

Volumn 99, Issue 1-2, 1998, Pages 197-202

  Lii, Ding Fwu ^a   Huang, Jow Lay ^b   Lin, Ming Hung ^b  

^a Chinese Naval Academy Kaohsiung   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Aluminium; Interlayer; Nitrogen; Sputtering; Titanium

Indexed keywords

EID: 0006435610     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00104-7     Document Type: Article

References (14)

1. W.-D. Munz, Titanium aluminum nitride films: a new alternative to TiN coatings, J. Vac. Sci. Technol. A4 (6) (1986) 2717-2725.
2. W. Konig, R. Fritsch, D. Kammermeier, Physically vapor deposited coatings on tools: performance and wear phenomena, Surf. Coat. Technol. 49 (1991) 316-324.
3. O. Knotek, W.D. Munz, T. Leyendecker, Industrial deposition of binary, ternary and zirconium and aluminum, J. Vac. Sci. Technol. A5 (4) (1987) 2173-2179.
4. T. Leyendecker, O. Lemmer, S. Esser, J. Ebberink, The development of the PVD coating as a commercial coating for cutting tools. Surf. Coat. Technol, 48 (1991) 175-178.
5. O. Knotek, T. Leyendecker, On the structure of (Ti, Al)N-PVD coatings, J. Solid State Chem. 70 (1987) 318-322.
6. D.S. Rickerby, S.J. Bull, T. Robertson, A. Hendry, The role of titanium in the abrasive wear resistance of physically vapour-deposited TiN, Surf. Coat. Technol. 41 (1990) 63-74.
7. Y.-I. Chen, J.-G. Duh, Deposition of TiN films with titanium interlayer on low carbon steel by reactive R.F. magnetron sputtering. Surf. Coat. Technol. 46 (1991) 371-384.
8. K.A. Pischow, L. Eriksson, E. Hariu, A.S. Korhonen, E.O. Ristolanen, The influence of titanium interlayers on the adhesion of PVD TiN coatings on oxidized stainless steel substrates, Surf. Coat. Technol. 58 (1993) 163-172.
9. Y.-I. Chen, J.-G. Duh, TiN coatings on mild steel substrates with electroless nickel as an interlayer. Surf. Coat. Technol. 48 (1991) 163-168.
10. B.Y. Shew, J.L. Huang, The effects of nitrogen on reactively sputtered Ti-Al-N films, Surf. Coat. Technol. 71 (1995) 30-36.
11. B.Y. Shew, J.L. Huang, D.F. Lii, Effects of RF bias and nitrogen flow rates on the reactively sputtering TiAlN films, Thin Solid Films 293 (1997) 212-219.
12. P.K. Mehrotra, D.T. Quinto, Techniques for evaluating mechanical properties of hard coatings, J. Vac. Sci. Technol. A3 (6) (1985) 2401-2405.
13. D.A. Porter, K.E. Easterling, in Phase Transformations in Metals and Alloys, Chap. 3, Van Nostrand Reinhold, UK, 1981, pp. 142-150.
14. P.J. Burnett, D.S. Rickerby, The relationship between hardness and scratch adhesion, Thin Solid Films 154 (1987) 403-416.