|
|
Volumn 132, Issue 1, 2000, Pages 99-104
|
|
The influence of Er doping of Al-N sputtered coatings on their mechanical properties
a
a
|
|
Author keywords
Adhesion; Aluminium nitride; Erbium; Hardness; Sputtering
|
|
Indexed keywords
ADHESION;
CRYSTAL DEFECTS;
CRYSTAL ORIENTATION;
CRYSTAL STRUCTURE;
DOPING (ADDITIVES);
ERBIUM;
HARDNESS;
MAGNETRON SPUTTERING;
NITRIDES;
STEEL;
SUBSTRATES;
X RAY DIFFRACTION ANALYSIS;
LATTICE DISTORTION;
MECHANICAL PROTECTION;
STEEL ALLOYS;
THIN FILMS;
ADHESION;
CERAMIC COATING;
HARDNESS;
LANTHANIDE;
SPUTTERING;
|
|
EID: 0034292442
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(00)00865-3 Document Type: Article |
|
Times cited : (12)
|
|
References (11)
|
