Mechanical, tribological, and stress analyses of ion-beam-deposited boron-rich boron nitride films with increasing N content

Journal of Materials Research

Volumn 14, Issue 10, 1999, Pages 3962-3972

  Chan, K F ^a   Ong, C W ^a   Choy, C L ^a   Kwok, R W M ^b  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; CROSSLINKING; DEPOSITION; ELASTIC MODULI; HARDNESS; MOLECULAR STRUCTURE; STRESS ANALYSIS; THIN FILMS; TRIBOLOGY; VOLUME FRACTION; WEAR RESISTANCE;

BORON NITRIDE; ION-BEAM DEPOSITION;

BORON COMPOUNDS;

EID: 0033276970     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.1999.0536     Document Type: Article

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