Structural and optical properties of nitrogen-containing tetrahedral amorphous carbon films

Applied Physics A: Materials Science and Processing

Volumn 70, Issue 1, 2000, Pages 47-51

  Chen, D H ^a,b   Wei, A X ^a   Wong, S P ^b   Xu, J B ^b   Wu, M M ^a   Peng, S Q ^a  

^a SUN YAT SEN UNIVERSITY   (China)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ATOMIC FORCE MICROSCOPY; CARBON; COMPOSITION EFFECTS; ELECTRIC CONDUCTIVITY MEASUREMENT; ENERGY GAP; NITROGEN; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; STRUCTURE (COMPOSITION); SURFACE ROUGHNESS;

AMORPHOUS CARBON FILMS; MAGNETIC FILTERED PLASMA DEPOSITION; OPTICAL ABSORPTION SPECTROSCOPY; OPTICAL BANDGAP;

AMORPHOUS FILMS;

EID: 0033699660     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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