IrO2/Pb(Zr,Ti)O3/Pt capacitor degradation with D2 gas at elevated temperature

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 2 A, 2002, Pages 698-701

  Cross, Jeffrey S ^a   Horii, Yoshimasa ^a   Mizuta, Naomi ^a   Watanabe, Satoru ^a   Eshita, Takeshi ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Degradation; Deuterium; Diffusion; Hydrogen; PZT; SIMS

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DEGRADATION; DEUTERIUM; DIFFUSION; ELECTRODES; FERROELECTRIC DEVICES; HYSTERESIS; IRIDIUM COMPOUNDS; POLARIZATION; SECONDARY ION MASS SPECTROMETRY;

FERROELECTRIC CAPACITORS;

CAPACITORS;

EID: 0036478557     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.698     Document Type: Article

References (17)