Deuterium in (Ba,Sr)TiO3 thin films: Kinetics and mechanisms of incorporation and removal during annealing

Journal of Applied Physics

Volumn 89, Issue 11 I, 2001, Pages 6378-6388

  McIntyre, P C ^a   Ahn, J H ^a   Becker, R J ^a   Wang, R V ^a   Gilbert, S R ^b   Mirkarimi, L Wills ^b   Schulberg, M T ^c  

^a Stanford University   (United States)

^b AGILENT TECHNOLOGIES   (United States)

^c Novellus Systems   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035356362     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1367316     Document Type: Article

References (29)

1. S. K. Hong, C. S. Whang, O. S. Kwon, and N. S. Kang, Appl. Phys. Lett. 76, 324 (2000).
2. J. Im, O. Auciello, A. R. Krauss, D. M. Gruen, R. P. H. Chang, S. H. Kim, and A. I. Kingon, Appl. Phys. Lett. 74, 1162 (1999).
3. J.-P. Han and T. P. Ma, Appl. Phys. Lett. 71, 1267 (1997).
4. J. T. Evans, Jr., L. L. Boyer, G. Velasquez, R. Ramesh, S. Aggarwal, and V. Keramidas, Jpn. J. Appl. Phys., Part 1 38, 5361 (1999).
5. D. Hadad, T. S. Chen, V. Balu, B. Jiang, S. H. Kuah, P. McIntyre, S. Summerfelt, J. M. Anthony, and J. C. Lee, Integr. Ferroelectr. 17, 471 (1997).
6. G. W. Dietz, M. Schumacher, R. Waser, S. K. Streiffer, C. Basceri, and A. I. Kingon, J. Appl. Phys. 82, 2359 (1997).
7. C. Basceri, S. K. Streiffer, A. I. Kingon, and R. Waser, J. Appl. Phys. 82, 2497 (1997).
8. G. W. Dietz and R. Waser, Thin Solid Films 299, 53 (1997).
9. J. D. Baniecki et al., J. Eur. Ceram. Soc. 19, 1457 (1999).
10. J-H. Ahn, P. C. McIntyre, L. W. Mirkarimi, S. R. Gilbert, J. Amano, and M. Schulberg, Appl. Phys. Lett. 77, 1378 (2000).
11. R. Waser, J. Am. Ceram. Soc. 71, 58 (1988): R. Waser, Ber. Bunsenges, Phys. Chem. 90, 1223 (1986).
12. R. Waser, J. Am. Ceram. Soc. 71, 58 (1988): R. Waser, Ber. Bunsenges, Phys. Chem. 90, 1223 (1986).
13. D. Houde, Y. Lépine, C. Pépin, S. Jandl, and J. L. Brebner, Phys. Rev. B 35, 4948 (1987).
14. S. R. Gilbert, Fall MRS Meeting, 1 December 1999, Boston, MA.
15. A. M. Cowley and S. M. Sze, J. Appl. Phys. 36, 3212 (1965).
16. H. Shen et al., Mater. Res. Soc. Symp. Proc. 493, 33 (1998).
17. T. M. Shaw, Fall MRS Meeting, 29 November 1999, Boston, MA.
18. G. B. Alers, Spring MRS Meeting, 25 April 2000 San Francisco, CA.
19. Charles Evans and Associates, Redwood City, CA 94063.
20. H. S. Carslaw and J. C. Jaeger, Conduction of Heat in Solids (Clarendon, Oxford, 1959), p. 251.
21. Paritosh, D. J. Srolovitz, C. C. Battaile, X. Li, and J. E. Butler, Acta Mater. 47, 2269 (1999).
22. Y. von Kaenel, J. Stiegler, E. Blank, O. Chauvet, Ch. Hellwig, and K. Plamann, Phys. Status Solidi A 154, 219 (1996).
23. J. D. Baniecki, C. Parks, R. B. Laibowitz, T. M. Shaw, J. Lian, and G. Costrini, Mater. Res. Soc. Symp. Proc. 596, 25 (2000).
24. M. V. Raymond and D. M. Smyth, Ferroelectrics 144, 129 (1993).
25. S. Stemmer, S. K. Streiffer, N. D. Browning, and A. I. Kingon, Appl. Phys. Lett. 74, 2432 (1999).
26. S. Aggarwal, S. R. Perusse, C. W. Tipton, R. Ramesh, H. D. Drew, T. Venkatesan, D. B. Romero, V. B. Podobedov, and A. Weber, Appl. Phys. Lett. 73, 1973 (1998).
27. Y. Shimamoto, K. Kushida-Abdelghafar, H. Miki, and Y. Fujisaka, Appl. Phys. Lett. 70, 3096 (1997).
28. T. Baiatu, R. Waser, and K.-H. Hardtl, J. Am. Ceram. Soc. 73, 1663 (1990).
29. J. Crank, The Mathematics of Diffusion, 2nd Edition (Oxford University Press, Oxford, 1975), p. 141.