NiTi thin films as a gate of M.O.S. capacity sensors

Sensors and Actuators, A: Physical

Volumn 74, Issue 1, 1999, Pages 242-245

  Bendahan, Marc ^a   Aguir, Khalifa ^a   Seguin, Jean Luc ^a   Carchano, Herve ^a  

^a des Couches Minces   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC PROPERTIES; ELECTRODES; MICROACTUATORS; NICKEL ALLOYS; PHASE TRANSITIONS; SENSORS; SHAPE MEMORY EFFECT; SPUTTER DEPOSITION;

ELECTRIC CHARACTERIZATION; MOS CAPACITIVE SENSOR;

THIN FILMS;

EID: 0032677314     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00350-1     Document Type: Article

References (10)

1. D. Johnson Vacuum-deposited TiNi shape memory film: characterization and applications in microdevices J. Micromech. Microeng. 1 1990 34 41
2. J.D. Johnson J. Busch C. Ray C. Sloan Fabrication of silicon-based shape memory alloy micro-actuators Mat. Res. Soc. Symp. Proc. 276 1992 151 160
3. E. Patoor, M. Berveiller, Technologie des Alliages â Mémoire de Forme, Hermès, Paris, 1994.
4. G. Guenin, Techniques de l'Ingénieur, Les alliages â mémoire de forme, M530-8.
5. M. Bendahan J.-L. Seguin D. Lollman H. Carchano New type of Schottky barriers using NiTi shape memory alloy films Thin Solid Films 294 1–2 1997 278 280
6. M. Bendahan P. Canet J.-L. Seguin H. Carchano Control composition study of NiTi shape memory alloy films Materials Science and Engineering B 34 1995 112 115
7. M. Bendahan J.-L. Seguin P. Canet H. Carchano NiTi shape memory alloy films: composition control using optical emission spectroscopy Thin Solid Films 283 1996 61 66
8. J.L. Seguin, M. Bendahan, A. Isalgue, V. Esteve-Cano, H. Carchano, V. Torra, EMRS 98, 16–19 juin, Grenoble, Symposium H: Materials Aspects in Microsystem Technologies, accepted publication in sensors and Actuators A.
9. W. Van Gelder E.H. Nicollian J. Electrochem. Soc. 118 1971 138
10. x films on GaAs and Si J.A.P 54 9 1983 5064