Using in-line equipment condition and yield information for maintenance scheduling and dispatching in semiconductor wafer fabs

IIE Transactions (Institute of Industrial Engineers)

Volumn 34, Issue 2, 2002, Pages 191-209

  Sloan, Thomas W ^a   Shanthikumar, J George ^b  

^a UNIVERSITY OF MIAMI   (United States)

^b DEPARTMENT OF INDUSTRIAL ENGINEERING AND OPERATIONS RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDITION MONITORING; DECISION MAKING; MAINTAINABILITY; MARKOV PROCESSES; MATHEMATICAL MODELS; PRODUCTION ENGINEERING; SCHEDULING; SILICON WAFERS;

EQUIPMENT CONDITION; MARKOV DECISION PROCESS MODEL; PRODUCTION DISPATCHING; YIELD;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0036468407     PISSN: 0740817X     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1011900215443     Document Type: Article

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