Real-time process monitoring

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1996, Pages 382-390

  Bunkofske, Raymond J ^a   Pascoe, Nancy Tovey ^a   Colt, John Z ^a   Smit, Michael W ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; COSTS; DATA ACQUISITION; DATA REDUCTION; DATABASE SYSTEMS; LOCAL AREA NETWORKS; PRODUCT DESIGN; PRODUCTIVITY; QUALITY ASSURANCE; REAL TIME SYSTEMS;

DATA ANALYSIS SYSTEM; REAL TIME PROCESS MONITORING SYSTEM; STATISTICAL PROCESS CONTROL SYSTEM;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030405866     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)