Model-based control in microelectronics manufacturing

Proceedings of the IEEE Conference on Decision and Control

Volumn 4, Issue , 1999, Pages 4185-4191

  Edgar, T F ^a   Campbell, W J ^a   Bode, C ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; LITHOGRAPHY; MATHEMATICAL MODELS; PREDICTIVE CONTROL SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE;

CHEMICAL MECHANICAL PLANARIZATION; MULTIVARIABLE RUN TO RUN CONTROL; THERMAL PROCESSING REACTORS;

STATISTICAL PROCESS CONTROL;

EID: 0033307056     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)