Fabrication of diffractive phase elements for the UV-range by laser ablation patterning of dielectric layers

Applied Surface Science

Volumn 197-198, Issue , 2002, Pages 856-861

  Ihlemann, J ^a   Schafer D ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

Dielectric layers; Diffractive phase elements; Layer ablation; Ta 2 O 5

Indexed keywords

DIFFRACTIVE OPTICS; FUSED SILICA; LASER ABLATION; LASER PULSES; MASKS; OPTICAL DEVICES; TRANSPARENCY; ULTRAVIOLET RADIATION;

DIFFRACTIVE OPTICAL PHASE ELEMENTS (DPE);

DIELECTRIC MATERIALS;

EID: 0036424648     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00462-2     Document Type: Conference Paper

References (15)

1. J. Turunen, F. Wyrowski (Eds.), Diffractive Optics for Industrial and Commercial Applications, Verlag, Berlin, 1997.
2. D. Schäfer, J. Ihlemann, G. Marowsky, B. Burghardt, M. Timm, OSA Technical Digest Series, Optical Society of America, Washington, DC, 2000, pp. 189-191.
3. Schäfer D. J. Opt. Soc. Am. A 18 2001 2915.
4. Behrmann G.P., Duignan M.T. Appl. Opt. 36 1997 4666.
5. Vainos N.A., Mailis S., Pissadakis S., Boutsikaris L., Parmiter P.J.M., Dainty P., Hall T.J. Appl. Opt. 35 1996 6304.
6. Wang X., Leger J.R., Rediker R.H. Appl. Opt. 36 1997 4660.
7. Zergioti I., Mailis S., Vainos N.A., Ikiades A., Grigoropoulos C.P., Fotakis C. Appl. Surf. Sci. 138/139 1999 82.
8. Ihlemann J., Wolff B., Simon P. Appl. Phys. A 54 1992 363.
9. Buerhop C., Blumenthal B., Weismann R., Lutz N., Biermann S. Appl. Surf. Sci. 46 1990 430.
10. P.R. Herman, R.S. Marjoribanks, A. Oettl, K. Chen, I. Konovalov, S. Ness, Appl. Surf. Sci. 154/155, 2000, p. 577.
11. Ihlemann J., Wolff-Rottke B. Appl. Surf. Sci. 86 1995 228.
12. Ihlemann J., Rubahn K. Appl. Surf. Sci. 154-155 2000 587.
13. Schäfer D., Ihlemann J., Mann K., Marowsky G. Appl. Phys. A 69 1999 S319.
14. Beinhorn F., Ihlemann J., Simon P., Marowsky G., Maisenhölder B., Edlinger J., Neuschäfer D., Anselmetti D. Appl. Surf. Sci. 138-139 1999 107.
15. Kawata S., Hikima I., Ichihara Y., Watanabe S. Appl. Opt. 31 1992 387.