Excimer laser patterned dielectric masks for the fabrication of Diffractive Optical Elements by laser ablation

Applied Physics A: Materials Science and Processing

Volumn 69, Issue 7, 1999, Pages

  Schafer D ^a   Ihlemann, J ^a   Mann, K ^a   Marowsky, G ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038234441     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390051408     Document Type: Article

References (12)

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