Excimer laser micro machining: Fabrication and applications of dielectric masks

Applied Surface Science

Volumn 154, Issue , 2000, Pages 587-592

  Ihlemann, J ^a   Rubahn, K ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; DIFFRACTIVE OPTICS; EXCIMER LASERS; LASER ABLATION; LIGHT REFLECTION; MASKS; MICROMACHINING; OPTICAL MATERIALS; OPTICAL RESOLVING POWER; QUARTZ; TRANSPARENCY;

DIELECTRIC MASKS; LASER MICROMACHINING;

PHOTOLITHOGRAPHY;

EID: 0033885154     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00464-X     Document Type: Article

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