Multifacet Kinoforms for KrF excimer laser

Optics InfoBase Conference Papers

Volumn , Issue , 2000, Pages 189-191

  Schäfer, Dirk ^a   Ihlemann, Jürgen ^a   Marowsky, Gerd ^a   Burghardt, Berthold ^b   Timm, Marc ^b  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

^b MicroLas Lasersystem GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; FLUORINE COMPOUNDS;

BEAM HOMOGENIZATION; BEAM-SHAPING; FRESNEL; KINOFORM; KRF EXCIMER LASER; OPTICAL RECONSTRUCTION; PARTIAL COHERENT; SUBAPERTURE;

LASER BEAMS;

EID: 25544468996     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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