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Volumn 138-139, Issue 1-4, 1999, Pages 82-86

Microprinting and microetching of diffractive structures using ultrashort laser pulses

Author keywords

Diffractive structures; Microetching; Microprinting; Ultrashort laser pulses

Indexed keywords


EID: 0345921777     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00526-1     Document Type: Article
Times cited : (32)

References (16)
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  • 2
    • 0000762972 scopus 로고
    • Metal deposition from a supported metal film using an excimer laser
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    • Bohandy, J.1    Kim, B.F.2    Adrian, F.J.3
  • 5
    • 0030565932 scopus 로고    scopus 로고
    • Excimer laser micromachining of inorganic dielectrics
    • J. Ihlemann, B. Wolff-Rottke, Excimer laser micromachining of inorganic dielectrics, Applied Surface Science 106 (1996) 282.
    • (1996) Applied Surface Science , vol.106 , pp. 282
    • Ihlemann, J.1    Wolff-Rottke, B.2
  • 6
    • 36449004926 scopus 로고
    • Thermophysical effects in laser processing of materials with picosecond and femtosecond pulses
    • P.P. Pronko, S.K. Dutta, D. Du, R.K. Singh, Thermophysical effects in laser processing of materials with picosecond and femtosecond pulses, J. Appl. Phys. 78 (1995) 6233.
    • (1995) J. Appl. Phys. , vol.78 , pp. 6233
    • Pronko, P.P.1    Dutta, S.K.2    Du, D.3    Singh, R.K.4
  • 8
    • 0031167370 scopus 로고    scopus 로고
    • Short-pulse UV laser ablation of solid and liquid metals: Indium
    • T. Götz, M. Stuke, Short-pulse UV laser ablation of solid and liquid metals: indium, Applied Physics A 64 (1997) 539-543.
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    • Götz, T.1    Stuke, M.2
  • 9
    • 0031258062 scopus 로고    scopus 로고
    • Laser ablation and micromachining with ultrashort laser pulses
    • X. Liu, D. Du, G. Mourou, Laser ablation and micromachining with ultrashort laser pulses, IEEE J. Quantum Electron. 33 (1997) 1706.
    • (1997) IEEE J. Quantum Electron. , vol.33 , pp. 1706
    • Liu, X.1    Du, D.2    Mourou, G.3
  • 10
    • 0030286598 scopus 로고    scopus 로고
    • Machining of submicron structures on metals and semiconductors by ultrashort UV laser pulses
    • P. Simon, J. Ilhemann, Machining of submicron structures on metals and semiconductors by ultrashort UV laser pulses, Applied Physics A 63 (1996) 505-508.
    • (1996) Applied Physics A , vol.63 , pp. 505-508
    • Simon, P.1    Ilhemann, J.2
  • 11
    • 0001550482 scopus 로고
    • Metal deposition at 532 nm using a laser transfer technique
    • J. Bohandy, B.F. Kim, F.J. Adrian, A.N. Jette, Metal deposition at 532 nm using a laser transfer technique, J. Appl. Phys. 63 (4) (1988) 1158.
    • (1988) J. Appl. Phys. , vol.63 , Issue.4 , pp. 1158
    • Bohandy, J.1    Kim, B.F.2    Adrian, F.J.3    Jette, A.N.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.