Hierarchical processing for accurate optical proximity correction for 1-Gbit DRAM metal layers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3679, Issue II, 1999, Pages 614-621

  Kobayashi, Sachiko ^a   Uno, Taiga ^a   Yamamoto, Kazuko ^a   Tanaka, Satoshi ^a   Kotani, Toshiya ^a   Inoue, Soichi ^a   Higurashi, Hitoshi ^a   Watanabe, Susumu ^a   Yano, Mitsuhiro ^a   Ohki, Shinichiro ^a   Tsunakawa, Kiyoshi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DYNAMIC RANDOM ACCESS STORAGE; ERROR CORRECTION; HIERARCHICAL SYSTEMS; MASKS;

DATA VOLUME EXPANSION; HIERARCHICAL MANAGEMENT; OPTICAL PROXIMITY CORRECTION (OPC);

PHOTOLITHOGRAPHY;

EID: 0032625691     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (13)