Development of silicon grisms and immersion gratings for high resolution infrared spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4485, Issue , 2002, Pages 393-404

  Ge, Jian ^a   McDavitt, Dan ^a   Bernecker, John ^a   Miller, Shane ^a   Ciarlo, Dino ^b   Kuzmenko, Paul ^b  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Infrared; Silicon grism; Silicon immersion grating; Spectroscopy

Indexed keywords

COMPOSITION; DIFFRACTION GRATINGS; DISTORTION (WAVES); ETCHING; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SILICON; WAVEFRONTS;

HIGH RESOLUTION INFRARED SPECTROSCOPY; IMMERSION GRATINGS; SILICON GRISMS; TETRAMETHYL AMMONIUM HYDROXIDE;

INFRARED SPECTROSCOPY;

EID: 0036397902     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.454275     Document Type: Article

References (28)

1. Bennett, J.M., & Mattsson, L., 1989, "Introduction to Surface Roughness and Scattering," 51-52, Optical Society of America, Washington, D.C.
2. Dekker, H., "An immersion grating for an astronomical spectrograph", in "Instrumentation for ground-based optical astronomy", ed. L.B. Robinson (Springer Verlag, 1987), 183
3. Ebizuka, N. et al. 2000, "Development of Grisms and Immersion Gratings for the Spectrographs of the Subaru Telescope," in Imaging the Universe in Three Dimensions. ASP Conf. Vol. 195. Edited by W. van Breugel and J. Bland-Hawthorn, 564
4. Franke, A.E. et al. 1997, "Super-smooth x-ray reflection grating fabrication," J. Vac. Sci. Technol., B 15(6), 2940.
5. Ge, J., et al., 1999a, "Etched Silicon Gratings for NGST," in Proc. Next Generation Space Telescope Science and Technology, ASP Conference Series, Edited by Eric Smith and Knox Long, Vol. 207, 457
6. Ge, J., et al., 1999b, "The First Light of the World's First Silicon Grisms," BAAS, 195, 1504.
7. Ge, J., et al. 2000, "High spectral and spatial resolution spectroscopy of YSOs with a silicon grism and adaptive optics," BAAS, 197, 5201.
8. Ge, J. et al. 2001, "Development of Silicon Grisms for High-resolution IR spectroscopy", in Preparation
9. Graf, U. U. et al. 1994, "Fabrication and evaluation of an etched infrared diffraction grating," Appl. Opt., 33, 96
10. Hulthen, E., & Neuhaus, H., 1954, "Diffraction gratings in immersion," Nature, 173
11. Jaffe, D.T., Keller, L.D., & Ershov, O.A., 1998, "Micromachined silicon diffraction gratings for infrared spectroscopy," Proc. SPIE, 3354, 201
12. Kaufl, H.U. et al. 1998, "Grisms from Germanium/Silicon for Astronomical Instruments," Proc. SPIE, 3354, 151
13. Keller, L.D., et al. 2000, "Fabrication and testing of chemically micromachined silicon echelle gratings," Appl. Optics, 39, 1094
14. Kuzmenko, P.J., Ciarlo, D.R., & Stevens, C.G., 1994, "Fabrication and testing of a silicon immersion grating for infrared spectroscopy," Proc. SPIE, 2266, 566.
15. Kuzmenko, P.J., & Ciarlo, D.R., 1998, "Improving the optical performance of etched silicon gratings," Proc. SPIE, 3354, 357
16. Kwa, T.A., et al. 1995, "Anisotropically etched silicon mirrors for optical sensor applications," J. Electrochem. Soc., Vol. 142 1226
17. Lloyd, J.P. et al. "IRCAL: the infrared camera for adaptive optics at Lick Observatory," Proc. SPIE, 4008, 814
18. McLean, I.S. et al. 1995, "NIRSPEC: a near-infrared cross-dispersed echelle spectrograph for the Keck II telescope," Proc. SPIE, 2475, 350
19. McLean, I.S. et al. 1998, "Design and development of NIRSPEC: a near-infrared echelle spectrograph for the Keck II telescope," SPIE, 3354, 566
20. McLean, I.S., 2000, "Scientific results with NIRSPEC on the Keck II Telescope," Proc. SPIE, 4005, 203
21. Pandy, A. et al. 1998, "Experimental investigation of high Si/Al selectivity during anisotropic etching in TMAH," J. Va, Sci. Technol. A 16(2), 868
22. Paranjape, M. et al. 2000, "Dual-doped TMAH silicon etchant for microelectromechanical structures and systems applications," J. Va, Sci. Technol. A 18(2), 738.
23. Sica, L.J., "High resolution diffraction grating," United Stated Patent (4, 474, 792), 1984.
24. Sullivan, P. et al. 2000, "TMAH Preferential Etching for IR Pixel Arrays," Technical Document 3097
25. Tong & Gosele, "Semiconductor wafer bonding: science and technology," John Wiley & Sons, Inc. 1999
26. Tsang, W.T., & Wang, S., 1975, "Preferentially etched diffraction gratings in silicon," J. Appl. Phys., 46, 2163
27. Vitali, F. et al. 2000, "Silicon grisms for high resolution spectroscopy in the near infrared," Proc. SPIE, 4008, 2000
28. Wiedemann, G., & Jennings, D.E., 1993, "Immersion grating for infrared astronomy," Appl. Opt., 32, 1176