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Volumn 4485, Issue , 2002, Pages 417-428

Design, performance and reliability of a high angular resolution, wide angular range, large aperture fully automated UV scatterometer

Author keywords

Diffraction grating; Grating efficiency; PMT; Scatter; Scatterometer; UV detectors; VUV

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; INTERFEROMETRY; LIGHT SCATTERING; PROFILOMETRY;

EID: 0036397268     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.454277     Document Type: Article
Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.