Rapid prototyping of plastic micro devices by excimerlaser ablation

Materials Research Society Symposium - Proceedings

Volumn 698, Issue , 2002, Pages 227-238

  Klotzbuecher, Thomas ^a   Mirtaheri, Peyman ^a   Braune, Torsten ^a  

^a OSLO UNIVERSITY HOSPITAL   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; LASER ABLATION; OPTICAL DEVICES; PLASTICS APPLICATIONS; THREE DIMENSIONAL;

PLASTIC MICRODEVICES; ULTRAVIOLET LASER RADIATION;

RAPID PROTOTYPING;

EID: 0036353383     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (29)

1. Microtechnology in modern health care
2. Miniaturized plastic micro plates for applications in HTS
3. Disposable electrophoresis chip for high throughput analysis of biomolecules
4. Microstructuring with excimer lasers
5. Polymer waveguides for telecom, datacom and sensor applications
6. Application of micro- and nanotechnologies for the fabrication of optical devices
7. Fabrication of microstructures with high aspect ratios and great structural hight by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
8. Mikroabformung-Verfahren, Werkzeuge, Anwendungen
9. A comparison of rapid prototyping technologies
10. Time-to-market
11. Biomedical micro device fabricated by micro stereo lithography (ICH process) "Metabiotic device" - a synthetic approach for life science
12. 3D microfabrication by combining microstereolithography and thick resist lithography
13. Rapid prototyping und rapid manufacturing für mikrobauteile
14. Einsatz von Rapid-Prototyping-Verfahren in der Mikrosystemtechnik
15. Interaction of laser radiation with organic polymers
16. Rapid prototyping using excimer laser microfabrication system
17. Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers
18. Polymer microsystems by excimerlaserablation: From rapid prototyping to large number fabrication
19. Combination of excimer laser micromachining and replication processes suited for large scale production
20. Kostengünstige Serienfertigung von Mikrobauteilen durch Laser-LIGA
21. Rapid prototyping in der Mikrosystemtechnik
22. Excimer laser projector for material processing application
23. Pulsed ultraviolet absorption
24. Structuring with excimer lasers-experimental and theoretical investigations on quality and efficiency
25. ArF-eximer laser ablation experiments on cycloolefin copolymer (COC)