Rapid prototyping using excimer laser microfabrication system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3512, Issue , 1998, Pages 374-385

  Krishnan, Ashok ^a   Nassar, Raja ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COMPUTER AIDED DESIGN; EXCIMER LASERS; LASER ABLATION; MICROMACHINING; RAPID PROTOTYPING; SURFACE ROUGHNESS;

EXCIMER LASER MICROFABRICATION SYSTEMS; PHOTOABLATED MICROSTRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032294887     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324082     Document Type: Conference Paper

References (15)