Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3933, Issue , 2000, Pages 290-298

  Klotzbuecher, Thomas ^a   Popp, Martin ^a   Braune, Torsten ^a   Haase, Jens ^a   Gaudron, Anne ^a   Smaglinski, Ingo ^a   Paatzsch, Thomas ^a   Bauer, Hans Dieter ^a   Ehrfeld, Wolfgang ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; EXCIMER LASERS; INTEGRATED OPTICS; LASER ABLATION; LIGHT PROPAGATION; MACHINING; OPTICAL DESIGN; OPTICAL FILTERS; PHOTOCHEMICAL REACTIONS; POLYMERS; SURFACE ROUGHNESS; ULTRAVIOLET RADIATION;

BEAM PROPAGATION METHOD (BPM); LASER MACHINING; LASER WRITING;

OPTICAL WAVEGUIDES;

EID: 0033690536     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.387565     Document Type: Conference Paper

References (25)