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Volumn , Issue , 2002, Pages 176-182

Warpage measurement comparison using shadow moiré and projection moiré methods

Author keywords

[No Author keywords available]

Indexed keywords

ERROR ANALYSIS; INTEGRATED CIRCUITS; INTEGRATED OPTICS; MOIRE FRINGES; PROJECTION SYSTEMS; SURFACE TENSION; SYSTEMS ANALYSIS;

EID: 0036297054     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (15)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.