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Volumn 45, Issue 2, 2002, Pages 90-96
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Low temperature synthesis of high quality SrTiO3 films
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CHEMICAL VAPOR DEPOSITION;
CRYSTALLIZATION;
DYNAMIC RANDOM ACCESS STORAGE;
ELECTRON CYCLOTRON RESONANCE;
IONIZATION;
IRRADIATION;
MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;
PERMITTIVITY;
PHYSICAL VAPOR DEPOSITION;
SPUTTERING;
SYNTHESIS (CHEMICAL);
PLASMA PARTICLES;
PLASMA PROPERTIES;
STRONTIUM TITANATE;
STRONTIUM COMPOUNDS;
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EID: 0036286848
PISSN: 05598516
EISSN: None
Source Type: Journal
DOI: 10.3131/jvsj.45.90 Document Type: Article |
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Times cited : (2)
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References (11)
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