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Volumn 41, Issue 1, 2002, Pages 225-234

Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering in optical coatings

Author keywords

[No Author keywords available]

Indexed keywords

LASER DAMAGE; LIGHT ABSORPTION; LIGHT SCATTERING; MAPPING; OPTICAL PUMPING; SCANNING; THIN FILMS;

EID: 0036285293     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.000225     Document Type: Article
Times cited : (17)

References (29)
  • 1
    • 0015761643 scopus 로고
    • The role of inclusions and linear absorption in laser damage to dielectric mirrors
    • NBS Spec. Publ
    • D. Milam and R. A. Bradbury, “The role of inclusions and linear absorption in laser damage to dielectric mirrors, ” in Laser-Induced Damage to Optical Materials, NBS Spec. Publ. 387, 124-132 (1973).
    • (1973) Laser-Induced Damage to Optical Materials , vol.387 , pp. 124-132
    • Milam, D.1    Bradbury, R.A.2
  • 2
    • 0028754066 scopus 로고
    • The role of defects in laser damage of multilayer coatings
    • H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE
    • M. R. Kozlowski and R. Chow, “The role of defects in laser damage of multilayer coatings, ” in Laser-Induced Damage in Optical Materials, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 2114, 640 -649 (1994).
    • (1994) Laser-Induced Damage in Optical Materials , vol.2114
    • Kozlowski, M.R.1    Chow, R.2
  • 3
    • 58149316379 scopus 로고    scopus 로고
    • Nano absorbing centers: A key point in laser damage of thin films
    • H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE
    • J. Dijon, T. Poiroux, and C. Desrumeaux, “Nano absorbing centers: a key point in laser damage of thin films, ” in Laser-Induced Damage in Optical Materials, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 2966, 315-325 (1997).
    • (1997) Laser-Induced Damage in Optical Materials , vol.2966 , pp. 315-325
    • Dijon, J.1    Poiroux, T.2    Desrumeaux, C.3
  • 4
    • 0001398662 scopus 로고
    • Photothermal measurements on optical thin films
    • E. Welsch and D. Ristau, “Photothermal measurements on optical thin films, ” Appl. Opt. 34, 7239-7253 (1995).
    • (1995) Appl. Opt. , vol.34 , pp. 7239-7253
    • Welsch, E.1    Ristau, D.2
  • 5
    • 0003227674 scopus 로고
    • Absorption measurements
    • R. E. Hummel and K. H. Guenther, eds, of Handbook of Optical Properties (CRC Press, BocaRaton, Fla, Chap. 9
    • E. Welsch, “Absorption measurements, ” in Thin Films for Optical Coatings, R. E. Hummel and K. H. Guenther, eds., Vol. 1 of Handbook of Optical Properties (CRC Press, Boca Raton, Fla., 1995), Chap. 9.
    • (1995) Thin Films for Optical Coatings , vol.1
    • Welsch, E.1
  • 6
    • 0000851767 scopus 로고    scopus 로고
    • Characterization of optical coatings by photothermal deflection
    • M. Commandre and P. Roche, “Characterization of optical coatings by photothermal deflection, ” Appl. Opt. 35, 5012-5034 (1996).
    • (1996) Appl. Opt. , vol.35 , pp. 5012-5034
    • Commandre, M.1    Roche, P.2
  • 7
    • 84975622195 scopus 로고
    • Absorption mapping for characterization of glass surfaces
    • M. Commandre, P. Roche, J. P. Borgogno, and G. Albrand, “Absorption mapping for characterization of glass surfaces, ” Appl. Opt. 34, 2372-2379 (1995).
    • (1995) Appl. Opt. , vol.34 , pp. 2372-2379
    • Commandre, M.1    Roche, P.2    Borgogno, J.P.3    Albrand, G.4
  • 9
    • 0027684776 scopus 로고
    • Absorption and thermal conductivity of oxyde thin films deposited by reactive low voltage ion plating measured by photothermal displacement and reflectance methods
    • Z. L. Wu, M. Reichling, X.-Q. Hu, K. Balasubramanian, and K. H. Guenther, “Absorption and thermal conductivity of oxyde thin films deposited by reactive low voltage ion plating measured by photothermal displacement and reflectance methods, ” Appl. Opt. 32, 5660-5664 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 5660-5664
    • Wu, Z.L.1    Reichling, M.2    Hu, X.-Q.3    Balasubramanian, K.4    Guenther, K.H.5
  • 10
    • 0000687747 scopus 로고
    • Micrometer resolved photothermal displacement inspection of optical coatings
    • E. Welsch and M. Reichling, “Micrometer resolved photothermal displacement inspection of optical coatings, ” J. Mod. Opt. 40, 1455-1475 (1993).
    • (1993) J. Mod. Opt. , vol.40 , pp. 1455-1475
    • Welsch, E.1    Reichling, M.2
  • 11
    • 85010185860 scopus 로고
    • Micrometer resolved inspection of defects and laser damage sites in UV high-reflecting coatings by photothermal displacement microscopy
    • Bodemann, N. Kaiser, M. Reichling, and E. Welsch, “Micrometer resolved inspection of defects and laser damage sites in UV high-reflecting coatings by photothermal displacement microscopy, ” J. Phys. Vol IV 4, C7611-C7614 (1994).
    • (1994) J. Phys. , vol.4 , Issue.4 , pp. C7611-C7614
    • Bodemann, N.K.1    Reichling, M.2    Welsch, E.3
  • 13
    • 0029534269 scopus 로고
    • New insight into defect-induced damage in UV multilayer coatings
    • H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE
    • M. Reichling, A. Bodeman, and N. Kaiser, “New insight into defect-induced damage in UV multilayer coatings, ” in Laser-Induced Damage in Optical Materials: 1994, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 2428, 307-316 (1995).
    • (1995) Laser-Induced Damage in Optical Materials: 1994 , vol.2428 , pp. 307-316
    • Reichling, M.1    Bodeman, A.2    Kaiser, N.3
  • 14
    • 0005047475 scopus 로고    scopus 로고
    • Investigation of the absorption induced damage in ultraviolet dielectric thin films
    • E. Welsch, P. Thomsen-Schmidt, D. Schafer, and N. Kaiser, “Investigation of the absorption induced damage in ultraviolet dielectric thin films, ” Opt. Eng. 36, 504-514 (1997).
    • (1997) Opt. Eng. , vol.36 , pp. 504-514
    • Welsch, E.1    Thomsen-Schmidt, P.2    Schafer, D.3    Kaiser, N.4
  • 15
    • 0027677835 scopus 로고
    • Comparison of surface and bulk scattering in optical coatings
    • C. Amra, C. Grèzes-Besset, and L. Bruel, “Comparison of surface and bulk scattering in optical coatings, ” Appl. Opt. 32, 5492-5503 (1993).
    • (1993) Appl. Opt. , vol.32 , pp. 5492-5503
    • Amra, C.1    Grèzes-Besset, C.2    Bruel, L.3
  • 16
    • 0028367822 scopus 로고
    • Light scattering from multilayer optics. A. Investigation tools
    • C. Amra, “Light scattering from multilayer optics. A. Investigation tools, ” J. Opt. Soc. Am. 11, 197-210 (1994).
    • (1994) J. Opt. Soc. Am. , vol.11 , pp. 197-210
    • Amra, C.1
  • 17
    • 0028368291 scopus 로고
    • Light scattering from multilayer optics. II. Application to experiment
    • C. Amra, “Light scattering from multilayer optics. II. Application to experiment, ” J. Opt. Soc. Am. A 11, 221-226 (1994).
    • (1994) J. Opt. Soc. Am. A , vol.11 , pp. 221-226
    • Amra, C.1
  • 18
    • 84975605156 scopus 로고
    • Light scattering from the volume of optical thin films: The ory and experiment
    • S. Kassam, A. Duparre, K. Hehl, P. Bussemer, and J. Neubert, “Light scattering from the volume of optical thin films: the ory and experiment, ” Appl. Opt. 31, 1304-1313 (1992).
    • (1992) Appl. Opt. , vol.31 , pp. 1304-1313
    • Kassam, S.1    Duparre, A.2    Hehl, K.3    Bussemer, P.4    Neubert, J.5
  • 19
    • 0030287730 scopus 로고    scopus 로고
    • Roughness analysis of optical films and substrates by atomic force microscopy
    • C. Ruppe and A. Duparre, “Roughness analysis of optical films and substrates by atomic force microscopy, ” Thin Solid Films 288, 8-13 (1996).
    • (1996) Thin Solid Films , vol.288 , pp. 8-13
    • Ruppe, C.1    Duparre, A.2
  • 20
    • 0030270174 scopus 로고    scopus 로고
    • Multiscale roughness in optical multilayers: Atomic force microscopy and light scattering
    • C. Deumie, R. Richier, P. Dumas, and C. Amra, “Multiscale roughness in optical multilayers: atomic force microscopy and light scattering, ” Appl. Opt. 35, 5583-5594 (1996).
    • (1996) Appl. Opt. , vol.35 , pp. 5583-5594
    • Deumie, C.1    Richier, R.2    Dumas, P.3    Amra, C.4
  • 21
    • 84894011466 scopus 로고    scopus 로고
    • Cartographies dabsorption et de diffusion de couches minces optiques. Bilan des pertes interfaces/vol-ume. Corrélation defauts locaux— endommagement laser
    • Université d’Aix-Marseille III, Marseille, France
    • L. Escoubas, “Cartographies d’absorption et de diffusion de couches minces optiques. Bilan des pertes interfaces/vol-ume. Corrélation defauts locaux— endommagement laser, ” D. Sc. dissertation (Université d’Aix-Marseille III, Marseille, France 1997).
    • (1997) D. Sc. Dissertation
    • Escoubas, L.1
  • 24
    • 0032660623 scopus 로고    scopus 로고
    • Statistical distribution of optical losses in bare substrates and thin films through increasing spatial windows
    • C. Amra and H. Macleod, eds., Proc. SPIE
    • A. Gatto and M. Commandré, “Statistical distribution of optical losses in bare substrates and thin films through increasing spatial windows, ” in Advances in Optical Interference Coatings, C. Amra and H. Macleod, eds., Proc. SPIE 3738, 197-207 (1999).
    • (1999) Advances in Optical Interference Coatings , vol.3738 , pp. 197-207
    • Gatto, A.1    Commandré, M.2
  • 25
    • 0034547201 scopus 로고    scopus 로고
    • Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering of optical coatings
    • G. A. Al-Jumaily, A. Duparre, and B. Singh, eds., Proc. SPIE
    • A. Gatto and M. Commandré, “Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering of optical coatings, ” in Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, G. A. Al-Jumaily, A. Duparre, and B. Singh, eds., Proc. SPIE 4099, 110-123 (2000).
    • (2000) Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industrie , vol.4099 , pp. 110-123
    • Gatto, A.1    Commandré, M.2
  • 26
    • 0004260764 scopus 로고    scopus 로고
    • International Standard (International Organization for Standardization, Geneva
    • International Organization for Standardization, ISO 11551: Test Method for Absorptance of Optical Laser Components, International Standard (International Organization for Standardization, Geneva, 1997).
    • (1997) ISO 11551: Test Method for Absorptance of Optical Laser Components
  • 27
    • 85010163152 scopus 로고    scopus 로고
    • Bestimmung des Absorptionsgrads
    • Eureka-Verbundprojekt EUROLASER CHOCLAB (EU 1269), Instruments and Standardization Procedures for Laser Beam and Optics Characterization (Laser Zentrum Hannover e.V., Hannover, Germany
    • U. Willamowski, D. Ristau, T. Gross, P. Kadkhoda, H. Ehlers, and K. Starke, “Bestimmung des Absorptionsgrads, ” in Untersuchungen zu ISO Standardmessverfarhen zur Charakterisierung optischer Laserkomponenten, Eureka-Verbundprojekt EUROLASER CHOCLAB (EU 1269), Instruments and Standardization Procedures for Laser Beam and Optics Characterization (Laser Zentrum Hannover e.V., Hannover, Germany, 1998), pp. 31-97.
    • (1998) Untersuchungen Zu ISO Standardmessverfarhen Zur Charakterisierung Optischer Laserkomponenten , pp. 31-97
    • Willamowski, U.1    Ristau, D.2    Gross, T.3    Kadkhoda, P.4    Ehlers, H.5    Starke, K.6
  • 29
    • 84894000411 scopus 로고    scopus 로고
    • working draft of document ISO TC 172/SC 9/WG 6 (International Organization for Standardization, Geneva
    • International Organization for Standardization, Test Method for Radiation Scattered by Optical Components, working draft of document ISO TC 172/SC 9/WG 6 (International Organization for Standardization, Geneva, 1997).
    • (1997) Test Method for Radiation Scattered by Optical Components


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