X-ray multilayer monochromator with enhanced performance

Applied Optics

Volumn 41, Issue 1, 2002, Pages 239-244

  André, Jean Michel ^a,d   Benbalagh, Rabah ^a   Barchewitz, Robert ^a   Ravet, Marie Françoise ^b   Raynal, Alain ^b   Delmotte, Frank ^b   Bridou, Françoise ^b   Julié, Gwénäelle ^b   Bosseboeuf, Alain ^b   Laval, René ^b   Soullie, Gérard ^c,d   Rémond, Christian ^c,d   Fialin, Michel ^a  

^a SORBONNE UNIVERSITÉ   (France)

^b CNRS   (France)

^c CEA DAM DIF   (France)

^d UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; DIFFRACTION GRATINGS; LITHOGRAPHY; OPTICAL MULTILAYERS; OPTICAL RESOLVING POWER; REACTIVE ION ETCHING; THIN FILMS; X RAY OPTICS;

X-RAY MULTILAYER MONOCHROMATORS;

MONOCHROMATORS;

EID: 0036279503     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.000239     Document Type: Article

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