Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy

Journal of Physics D: Applied Physics

Volumn 32, Issue 10 A, 1999, Pages

  Jergel, M ^a   Mikulik P ^b   Majkova E ^a   Luby, Š ^a   Senderak R ^a   Pincik E ^a   Brunel, M ^c   Hudek, P ^d   Kostic I ^d   Konecnikova A ^d  

^a INSTITUTE OF PHYSICS   (Slovakia)

^b MASARYK UNIVERSITY   (Czech Republic)

^c LABORATOIRE DE CRISTALLOGRAPHIE   (France)

^d INSTITUTE OF CHEMISTRY   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CHARACTERIZATION; EIGENVALUES AND EIGENFUNCTIONS; ELECTROMAGNETIC WAVE REFLECTION; INTERFACES (MATERIALS); SCANNING ELECTRON MICROSCOPY; SILICON; SURFACE ROUGHNESS; TUNGSTEN;

FRESNEL TRANSMISSION; GRATING TRUNCATION ROD; INTERFACE ROUGHNESS; LAMELLAR MULTILAYER GRATINGS; REFLECTION COEFFICIENTS; X RAY REFLECTIVITY;

MULTILAYERS;

EID: 0032657446     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/10A/343     Document Type: Article

References (11)

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