![]() |
Volumn 13, Issue 1, 2002, Pages 7-11
|
High quality-low temperature aluminum oxide films deposited by ultrasonic spray pyrolysis
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CURRENT VOLTAGE CHARACTERISTICS;
ELECTRIC BREAKDOWN OF SOLIDS;
ELLIPSOMETRY;
FILM PREPARATION;
INFRARED SPECTROSCOPY;
INTERFACES (MATERIALS);
LOW TEMPERATURE EFFECTS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PYROLYSIS;
REFRACTIVE INDEX;
SPRAYING;
ULTRASONIC APPLICATIONS;
ALUMINUM ACETYLACETONATE;
COULOMBIC POTENTIAL;
ELECTRICAL INTEGRITY;
ULTRASONIC SPRAY PYROLYSIS;
ALUMINA;
|
EID: 0036170062
PISSN: 09574522
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1013134727665 Document Type: Article |
Times cited : (20)
|
References (28)
|