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Volumn 13, Issue 1, 2002, Pages 7-11

High quality-low temperature aluminum oxide films deposited by ultrasonic spray pyrolysis

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC BREAKDOWN OF SOLIDS; ELLIPSOMETRY; FILM PREPARATION; INFRARED SPECTROSCOPY; INTERFACES (MATERIALS); LOW TEMPERATURE EFFECTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PYROLYSIS; REFRACTIVE INDEX; SPRAYING; ULTRASONIC APPLICATIONS;

EID: 0036170062     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1013134727665     Document Type: Article
Times cited : (20)

References (28)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.