Chemical vapor deposition and properties of amorphous aluminum oxide films

Materials Research Society Symposium - Proceedings

Volumn 446, Issue , 1997, Pages 383-388

  Gordon, Roy G ^a   Kramer, Keith ^a   Liu, Xinye ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; ELECTRIC CONDUCTIVITY OF SOLIDS; GLASS; IONS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTICAL COATINGS; SILICON; SUBSTRATES; TRANSPARENCY; VISCOSITY OF LIQUIDS; WATER; WEAR RESISTANCE;

ALUMINUM OXIDES; DIFFUSION BARRIERS;

AMORPHOUS FILMS;

EID: 0030673287     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)