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Thin Solid Films

Volumn 288, Issue 1-2, 1996, Pages 120-124

Refractive index and adhesion of Al2O3 thin films obtained from different processes - A comparative study

(4) Patil, P V a Bendale, D M a Puri, R K a Puri, Vijaya a

a SHIVAJI UNIVERSITY (India)

Author keywords

Al2O3 thin films; Electron beam evaporation; Post ambient refractive index; Refractive index

Indexed keywords

ADHESION; EVAPORATION; FILM PREPARATION; OXIDATION; POROSITY; REFRACTIVE INDEX; THIN FILMS;

ELECTRON BEAM EVAPORATION; POST AMBIENT REFRACTIVE INDEX;

ALUMINA;

EID: 0030284806 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)08855-4 Document Type: Article

Times cited : (65)

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