Characterization of carbon nitride thin films prepared by dual ion beam sputtering

Applied Physics Letters

Volumn 69, Issue 6, 1996, Pages 764-766

  Fernandez A ^a   Prieto, P ^b   Quiros C ^b   Sanz, J M ^b   Martin, J M ^c   Vacher, B ^c  

^a UNIVERSITY OF SEVILLE   (Spain)

^b INSTITUTO NICOLÁS CABRERA   (Spain)

^c LABORATOIRE DE TRIBOLOGIE ET DYNAMIQUE DES SYSTÈMES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040084765     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117884     Document Type: Article

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