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Volumn 200-202, Issue , 2002, Pages 153-159
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X-ray topographic analysis of misfit dislocation distribution in InGaAs and GeSi/Si partially relaxed heterostructures
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Author keywords
Misfit dislocation distribution; Threading dislocations; X ray topography
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Indexed keywords
COMPOSITION;
DISLOCATIONS (CRYSTALS);
HETEROJUNCTIONS;
MATHEMATICAL MODELS;
SEMICONDUCTING GERMANIUM COMPOUNDS;
X RAY DIFFRACTION ANALYSIS;
MISFIT DISLOCATION;
X RAY DOUBLE CRYSTAL TOPOGRAPHY;
X RAY TOPOGRAPHIC ANALYSIS;
SEMICONDUCTING INDIUM GALLIUM ARSENIDE;
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EID: 0036132328
PISSN: 10120386
EISSN: 16629507
Source Type: Journal
DOI: 10.4028/www.scientific.net/ddf.200-202.153 Document Type: Article |
Times cited : (1)
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References (16)
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