Damage evolution in helium-hydrogen Co-implanted (100) silicon

Solid State Phenomena

Volumn 82-84, Issue , 2002, Pages 291-296

  Tonini, R ^a   Corni, F ^a   Nobili, C ^a   Ottaviani, G ^a   Cazzaniga, F ^a   Queirolo, G ^a  

^a UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

Defects; Ion implantation; Si:H; Si:He; Voids

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEFECTS; HEAT TREATMENT; HELIUM; HYDROGEN; MORPHOLOGY; PLASTIC DEFORMATION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY;

ELASTIC RECOIL DETECTION; ISOCHRONAL HEAT TREATMENT;

ION IMPLANTATION;

EID: 0036129361     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (9)