Defects created by helium implantation at different temperatures in silicon

Solid State Phenomena

Volumn 82-84, Issue , 2002, Pages 285-290

  David, M L ^a   Oliviero, E ^a   Ratchenkova, A ^a   Gerasimenko, N N ^a   Declemy, A ^a   Barbot, J F ^a   Van Veen, A ^a   Beaufort, M F ^a  

^a SP2MI   (France)

Author keywords

Defects; Helium; Ion implantation; Silicon; Voids

Indexed keywords

DEFECTS; HELIUM; SEMICONDUCTING SILICON; SPECTROMETRY; TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY;

CROSS SECTION TRANSMISSION ELECTRON MICROSCOPY; HELIUM IMPLANTATION; THERMAL DESORPTION SPECTROMETRY;

ION IMPLANTATION;

EID: 0036129335     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (8)