Defects in silicon induced by high energy helium implantation and their evolution during anneals

Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties

Volumn 80, Issue 11, 2000, Pages 1975-1985

  Beaufort, M F ^a   Oliviero, E ^a   Garem, H ^a   Godey, S ^b   Ntsoenzok, E ^b   Blanchard, C ^a   Barbot, J F ^a  

^a UMR 6630 CNRS   (France)

^b Centre National de la Recherche Scientifique   (France)

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EID: 0034334872     PISSN: 13642812     EISSN: None     Source Type: Journal    
DOI: 10.1080/01418630050179717     Document Type: Article

References (18)