SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 1, 2002, Pages 431-435

Nondestructive analysis of ultrashallow junction implant damage by combined technology of thermal wave and spectroscopic methods

(2) Hovinen, Minna a Opsal, Jon a

a Therma Wave Inc (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; BORON; CRYSTAL DEFECTS; ELLIPSOMETRY; ION IMPLANTATION; NONDESTRUCTIVE EXAMINATION; OPTICAL DEVICES; PUMPING (LASER); REFLECTOMETERS; SILICON WAFERS; SPECTROSCOPIC ANALYSIS; THERMAL EFFECTS;

BEAM PROFILE ELLIPSOMETRY (BPE); THERMAL WAVE; ULTRASHALLOW JUNCTIONS;

SEMICONDUCTOR JUNCTIONS;

EID: 0036124842 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1446453 Document Type: Conference Paper

Times cited : (2)

References (12)

1
- 0000693557
- (1988) Appl. Phys. Lett. , vol.53 , pp. 1741
- Hong, S.N.¹ Ruggles, G.A.² Paulos, J.J.³ Wortman, J.J.⁴ Ozturk, M.C.⁵

2
- 0006359507
- (1997) IEEE Proc. , vol.527
- Hatzopoulos, N.¹ Suder, S.² Van den Berg, J.A.³ Donnelly, S.E.⁴ Cook, C.E.A.⁵ Armour, D.G.⁶ Lucassen, M.⁷ Frey, L.⁸ Bailey, P.⁹ Noakes, C.T.¹⁰ Pankin, D.¹¹ Fukarek, W.¹² Foad, M.A.¹³ England, J.G.¹⁴ Moffatt, S.¹⁵ Ohno, H.¹⁶

3
- 0000816723
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 316
- Hartford, C.L.¹ Hillard, R.J.² Mazur, R.G.³ Foad, M.A.⁴

4
- 11644254528
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 280
- Collart, E.J.H.¹ Weemers, K.² Gravesteijn, D.J.³ Van Berkum, J.G.M.⁴

5
- 0000841274
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 447
- Boyd Jr., W.¹ Lee, M.² Wagner, D.³ Romig, T.⁴ Bennett, J.⁵ Larson, L.⁶ Johnson, W.⁷ Zhou, L.⁸

6
- 0006331790
- edited by A. Mandelis (PTR Prentice Hall, Englewood Cliffs, NJ)
- (1994) Progress in Photothermal and Photoacoustic Science and Technology-II, Non-Destructive Evaluation , pp. 74-109
- Rosencwaig, A.¹

7
- 0006331211
- edited by A. Mandelis (PTR Prentice Hall, Englewood Cliffs, NJ)
- (1994) Progress in Photothermal and Photoacoustic Science and Technology-II, Non-Destructive Evaluation , pp. 53-72
- Opsal, J.¹ Rosencwaig, A.²

8
- 4243410744
- (1991) Nucl. Instrum. Methods Phys. Res. B , vol.55 , pp. 725
- Taylor, M.¹ Hurley, K.² Lee, K.³ Lemere, M.⁴ Opsal, J.⁵ Obrient, T.⁶

9
- 0031998527
- (1998) Thin Solid Films , vol.313 , pp. 308
- Leng, J.M.¹ Chen, J.² Fanton, J.³ Senko, M.⁴ Ritz, K.⁵ Opsal, J.⁶

10
- 0033458577
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 380
- Opsal, J.¹ Leng, J.M.² Aspnes, D.E.³

11
- 0000214583
- (1997) J. Appl. Phys. , vol.81 , pp. 3570
- Leng, J.M.¹ Sidorowich, J.J.² Yoon, Y.D.³ Opsal, J.⁴ Lee, B.H.⁵ Cha, G.⁶ Moon, J.⁷ Lee, S.I.⁸

12
- 0034543650
- (2000) Proc. SPIE , vol.4099 , pp. 228
- Leng, J.M.¹ Li, S.² Opsal, J.³ Aspnes, D.⁴ Lee, B.H.⁵ Lee, J.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.