Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 1, 2002, Pages 364-369

  Bale, M ^a   Palmer, R E ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DIFFRACTION GRATINGS; FABRICATION; IMAGE ANALYSIS; MASKS; PHOTORESISTS; PROBES; REACTIVE ION ETCHING; SEMICONDUCTING SILICON;

MULTIPLE-PROBE SCANNING TUNNELING MICROSCOPY; SILICON TIP STRUCTURES;

SCANNING TUNNELING MICROSCOPY;

EID: 0036124765     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1447242     Document Type: Conference Paper

References (17)