Conductive SPM probes of base Ti or W refractory compounds

Nanotechnology

Volumn 9, Issue 4, 1998, Pages 352-355

  Shevyakov, V ^a   Lemeshko, S ^a   Roschin, V ^a  

^a NT MDT Co   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ELECTRIC CONDUCTIVITY; SCANNING; SILICON; THIN FILMS;

CANTILEVERS;

SCANNING TUNNELING MICROSCOPY;

EID: 0032311971     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/9/4/009     Document Type: Article

References (9)

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